Substrate temperature effects on laser crystallized NiTi thin films

Amorphous sputter-deposited NiTi thin films were subjected to pulsed, melt-mediated laser crystallization techniques to engineer their microstructure. The effects of laser processing of preheated films are examined. Laser processing of films at an elevated substrate temperature has a significant effect on the rate with which solidification occurs. It is observed that the preheating temperature at which processing is carried out has significant implications for the resulting phase and microstructure, and therefore mechanical properties. Furthermore, the microstructural effects of varying incident laser energy density are examined via atomic force microscopy, scanning electron microscopy, and x-ray diffraction, and mechanical/shape memory properties are characterized via nanoindentation. © 2009 American Institute of Physics. DOI: 10.1063/1.3093678